SMC真空組件是將各種真空元件組合起來的多功能元件。

SMC真空組件有四個(gè)系列：ZM、ZX、ZR、ZL。
日本SMC真空組件ZX、ZR系列
日本SMC真空發(fā)生器ZM、ZMA、ZH、ZU、ZL、ZYY、ZYX、ZQ
日本SMC真空過濾器ZFA、ZFB、ZFC、
日本SMC真空吸盤ZP、ZPT、ZPX、ZPR
日本SMC真空用自由安裝型氣缸ZCUK系列
日本SMC真空用分水過濾器AMJ系列

ZM051AH-B5LNB ZR100-C15LZ-F ZM102H-M15 ZX100-J15LZB-D21C
ZM051AH-K5LZ-E15 ZR100-C35MZ-F ZM102H-X10 ZX100-J15LZB-EC
ZM051H-J5GB ZR100-K15G-D125 ZM102H-X111 ZX100-J15LZ-F
ZM051H-J5LB-M21 ZR100-K15G-D126 ZM102M-E15L ZX100-J3-PS
ZM051H-J5LZ ZR100-K15GS-F ZM102SH ZX100-K13LZ-EC
ZM051H-J5LZB ZR100-K15LZ-ECL ZM103AH-K5LZ-E15 ZX100-K15G-PS
ZM051H-K5GB ZR100-K15MOZB-F ZM103AH-K5LZ-E15CL ZX100-K15GS-F
ZM051H-K5GB-E15 ZR100-K15MOZ-F ZM103AH-K5LZ-E15L ZX100-K15GZ
ZM051H-K5LB ZR100-K15MZB-E ZM103AH-K5LZ-E16C ZX100-K15LB-PS
ZM051H-K5LB-E15 ZR100-K15MZB-F ZM103H-B5G-E14L-X107 ZX100-K15L-F
ZM051H-K5LB-E15C ZR100-K15MZ-E ZM103H-B5LZ ZX100-K15L-F-X102
ZM051H-K5LB-M21 ZR100-K15MZ-EC ZM103HF-K5LZ-E17 ZX100-K15LO-F
ZM051H-K5LZ ZR100-K25G-D125 ZM103H-J5LB-E15 ZX100-K15LOZB-PBCL
ZM051H-K5LZB ZR100-K25G-D126 ZM103H-J5LOZ-X111 ZX100-K15LOZ-F
ZM051H-K5LZB-E15 ZR100-K25LZB-EL ZM103H-J5LZB ZX100-K15L-PS
ZM051H-K5LZ-E15 ZR100-K25LZ-E ZM103H-K51LZ-E15L ZX100-K15LZ
ZM051H-Q5 ZR100-K25LZ-EC ZM103H-K5GB ZX100-K15LZB
ZM051HT-K5LZ ZR100-K25LZ-ECL ZM103H-K5GB-E15 ZX100-K15LZB-D21CL
ZM051SAH-K5G-M15L ZR100-K25LZ-EL ZM103H-K5GB-X143 ZX100-K15LZB-D21C-Y
ZM051SH-K5G ZR100-K25LZ-F ZM103H-K5G-E15L ZX100-K15LZB-D21L
ZM051SH-K5GB-E15 ZR110L1-K15GB-EC ZM103H-K5G-M21 ZX100-K15LZB-D21L-X142
ZM051SH-K5G-E14L ZR110L1-K25LB-EC ZM103H-K5LB-E15 ZX100-K15LZB-DP23
ZM052H ZR110L1-K25LZ-EC ZM103H-K5LOZB-X143 ZX100-K15LZB-DP24
ZM053AH-B5LNZB-X107 ZR110L1-K25MB-EC ZM103H-K5LOZ-E14L ZX100-K15LZB-EC
ZM053H-B5LNB ZR110L1-K25MZB-EC ZM103H-K5LOZ-X107 ZX100-K15LZB-F
ZM053H-B5LZB ZR110S1-K15LZB-EC ZM103H-K5LOZ-X111 ZX100-K15LZ-D21C
ZM053H-J5GB ZR110S1-K15MNZ-E ZM103H-K5LZ ZX100-K15LZ-E
ZM053H-J5GB-E15 ZR110S1-K15MZ-E ZM103H-K5LZB ZX100-K15LZ-EC
ZM053H-J5LOZ-X107 ZR110S1-K25GB-EL ZM103H-K5LZB-E14C ZX100-K15LZ-ECL
ZM053H-J5LZB ZR110S1-K25G-D126 ZM103H-K5LZB-E15 ZX100-K15LZ-F
ZM053H-K5GB-E15 ZR110S1-K25LZB-EC ZM103H-K5LZB-E55L ZX100-K15LZ-F-X102
ZM053H-K5G-E15L-X107 ZR110S1-K25LZ-F ZM103H-K5LZB-X143 ZX100-K15LZ-PS
ZM053H-K5LB ZR110S2-K25MZB-F ZM103H-K5LZ-E15 ZX100-K16G-F
ZM053H-K5LNB ZR110S3-K25LZB-E ZM103H-K5LZ-E15L ZX100-K1Y5LZ-ECL

日本SMC真空組件 SMC ZL系列為三級(jí)抽吸的真空發(fā)生器組件，帶真空過濾器及消音器，還有帶真空計(jì)或真空壓力開關(guān)、供給閥、破壞閥的形式。噴嘴直徑為1.2mm。當(dāng)供給壓力為0.4MPa時(shí)，極限真空度為84kPa，***大吸入流量為100/min(ANR)。新型ZL212系列的3段接收管由上下兩個(gè)重疊成一體，***大吸入流量可達(dá)200/min(ANR)。